Thermo Fisher, Helios MX1 PFIB-SEM

Name: Helios MX1 PFIB-SEM
Brand: Thermo Fisher
SKU: HELIOS-MX1

Unit Size: Each, Introducing the Thermo Scientific Helios MX1 PFIB-SEM, designed to accelerate time-to-data for semiconductor yield ramp and fab process control. This automated system enables rapid, high-throughput analysis of full 300 mm wafers, whether in the fab or the lab. With new multi-ion species plasma FIB technology, ultra-high-resolution SEM imaging, and powerful automation, the Helios MX1 PFIB-SEM facilitates fast, accurate, through volume critical dimension profiles (3D metrology) an

Catalog Number: HELIOS-MX1

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Category

Digital Microscopes

TagsElectron Microscopes Combined Focused Ion Beam-Scanning Electron Microscopes

CollectionsThermo Fisher Clinical Analyzers & Instruments for Diagnostic Labs Thermo Fisher General Lab Supplies for Daily Workflows — Nalgene, Nunc, Samco & Matrix Thermo Fisher Laboratory Kits for qPCR, ELISA, Transfection & NGS

Description

Unit Size: Each
Key features
• New multi-ion species plasma source (Xe+ / Ar+) for outstanding performance in high-volume removal and precision milling supporting diagonal mill, delayering, and cross section applications.
• New Metrology Studio user interface with flexible SMART targeted activities provides faster time to recipe and simplifies automated metrology development.
• Thermo Scientific MultiChem™ Gas Delivery System provides advanced capabilities for electron and ion beam-induced deposition and etching.
• ECS enables host-driven factory automation.
• iFast Software provides full orchestration of automated wafer navigation, milling, imaging, metrology, 3D reconstruction, virtual slice metrology, and data reporting.
• New Job History Services and web-based unified user interface, Cortex, provide a seamless user experience navigating to process images, designing metrology recipes, viewing metrology results, and 3D reconstructions.
• High-performance server to support acceleratedcomputation.
• New in-chamber, fixed sample calibration standards enable tool calibration and monitoring between wafer loads for improved availability.
• Standardized validation process for metrology performance matching and verification.

Specifications

General

Resolution	920 µm FOV
Type	PFIB Wafer DualBeam
Unit Size	Each

Ordering

Notice

Unless otherwise stated, the minimum order amount is USD 1,000.
For orders below USD 1,000, an additional handling fee may apply, or we may arrange local delivery / local handover where available.
All quotations are subject to final confirmation, including product availability, lead time, batch information, shipping cost, and applicable export or handling requirements.
For quotation requests, please send an RFQ from website or contact:

[email protected]

Please send inquiries directly to us in the “To” field. Emails sent via BCC, mass mailing, or with unrelated recipients may be automatically filtered and will not be processed.

Thermo Fisher, Helios MX1 PFIB-SEM

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General

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